JPH0636584Y2 - 基板収納容器 - Google Patents
基板収納容器Info
- Publication number
- JPH0636584Y2 JPH0636584Y2 JP1988113847U JP11384788U JPH0636584Y2 JP H0636584 Y2 JPH0636584 Y2 JP H0636584Y2 JP 1988113847 U JP1988113847 U JP 1988113847U JP 11384788 U JP11384788 U JP 11384788U JP H0636584 Y2 JPH0636584 Y2 JP H0636584Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate storage
- side holding
- wafer
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 91
- 239000000463 material Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 58
- 239000007788 liquid Substances 0.000 description 31
- 239000000126 substance Substances 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988113847U JPH0636584Y2 (ja) | 1988-08-29 | 1988-08-29 | 基板収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988113847U JPH0636584Y2 (ja) | 1988-08-29 | 1988-08-29 | 基板収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235448U JPH0235448U (en]) | 1990-03-07 |
| JPH0636584Y2 true JPH0636584Y2 (ja) | 1994-09-21 |
Family
ID=31354053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988113847U Expired - Lifetime JPH0636584Y2 (ja) | 1988-08-29 | 1988-08-29 | 基板収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636584Y2 (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0810196Y2 (ja) * | 1991-03-22 | 1996-03-27 | ヤマハ株式会社 | ウエハキャリア |
| JP2585005Y2 (ja) * | 1992-06-04 | 1998-11-11 | 株式会社柿崎製作所 | 半導体ウエハ用バスケット |
| JP2002329702A (ja) * | 2001-05-01 | 2002-11-15 | Sumitomo Electric Ind Ltd | 半導体基板洗浄治具と半導体基板洗浄治具へのウエハ挿入方法 |
| JP5153399B2 (ja) * | 2008-03-19 | 2013-02-27 | 三洋電機株式会社 | 基板ケース及び処理方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60926U (ja) * | 1983-06-15 | 1985-01-07 | ソニー株式会社 | 半導体基板の収納容器 |
| JPS60177642A (ja) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | 収納容器 |
| JPS6139545A (ja) * | 1984-07-31 | 1986-02-25 | Toshiba Ceramics Co Ltd | ウエ−ハ用キヤリヤ− |
-
1988
- 1988-08-29 JP JP1988113847U patent/JPH0636584Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235448U (en]) | 1990-03-07 |
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